Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films

G. Vaivars; J. Kleperis; J. Zubkans; G. Vitins; G. Liberts; A. Lusis

Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films

G. Vaivars^*
, J. Kleperis
, J. Zubkans
, G. Vitins
, G. Liberts
, A. Lusis

^*Corresponding author for this work

University of Latvia

Research output: Contribution to conference › Paper › peer-review

1 Citation (Scopus)

Abstract

New type resistive/capacitative gas sensitive structures were obtained by using a specially prepared substrate-glass, covered by thin conducting In₂O₃ layer, cut into a comb teeth-type electrodes by help of laser beam. Such laser processed gap in the layer of conducting material was a prototype of excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain a thin layers of different materials.

Original language	English
Pages	870-873
Number of pages	4
Publication status	Published - 1995
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995

Conference

Conference	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	25/06/95 → 29/06/95

Cite this

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title = "Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films",

abstract = "New type resistive/capacitative gas sensitive structures were obtained by using a specially prepared substrate-glass, covered by thin conducting In2O3 layer, cut into a comb teeth-type electrodes by help of laser beam. Such laser processed gap in the layer of conducting material was a prototype of excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain a thin layers of different materials.",

author = "G. Vaivars and J. Kleperis and J. Zubkans and G. Vitins and G. Liberts and A. Lusis",

year = "1995",

language = "English",

pages = "870--873",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films. / Vaivars, G.; Kleperis, J.; Zubkans, J. et al.
1995. 870-873 Paper presented at Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films

AU - Vaivars, G.

AU - Kleperis, J.

AU - Zubkans, J.

AU - Vitins, G.

AU - Liberts, G.

AU - Lusis, A.

PY - 1995

Y1 - 1995

N2 - New type resistive/capacitative gas sensitive structures were obtained by using a specially prepared substrate-glass, covered by thin conducting In2O3 layer, cut into a comb teeth-type electrodes by help of laser beam. Such laser processed gap in the layer of conducting material was a prototype of excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain a thin layers of different materials.

AB - New type resistive/capacitative gas sensitive structures were obtained by using a specially prepared substrate-glass, covered by thin conducting In2O3 layer, cut into a comb teeth-type electrodes by help of laser beam. Such laser processed gap in the layer of conducting material was a prototype of excellent humidity sensor, especially at high values of relative humidity (RH). Different additional coatings onto a laser processed gap were examined for humidity sensing. Sol-gel, vacuum thermal evaporation and laser evaporation methods were used to obtain a thin layers of different materials.

UR - https://www.scopus.com/pages/publications/0029489287

M3 - Paper

AN - SCOPUS:0029489287

SP - 870

EP - 873

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Application of sol-gel and laser evaporation methods to obtain thin gas sensitive films

Abstract

Conference

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