Atomic layer deposition of aluminum oxide on modified steel substrates

Kaupo Kukli; Emma Salmi; Taivo Jõgiaas; Roberts Zabels; Mikael Schuisky; Jörgen Westlinder; Kenichiro Mizohata; Mikko Ritala; Markku Leskelä

doi:10.1016/j.surfcoat.2016.06.064

Atomic layer deposition of aluminum oxide on modified steel substrates

Kaupo Kukli
, Emma Salmi
, Taivo Jõgiaas
, Roberts Zabels
, Mikael Schuisky
, Jörgen Westlinder
, Kenichiro Mizohata
, Mikko Ritala
, Markku Leskelä

Institute of Solid State Physics, University of Latvia

University of Tartu
University of Helsinki

Research output: Contribution to journal › Article › peer-review

17 Citations (Scopus)

Original language	English
Pages (from-to)	1-8
Journal	Surface and Coatings Technology
Volume	304
DOIs	https://doi.org/10.1016/j.surfcoat.2016.06.064
Publication status	Published - 2016

OECD Field of Science

1.3 Physical Sciences

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10.1016/j.surfcoat.2016.06.064

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@article{41dde4dd86814aa88e2583be389233bd,

title = "Atomic layer deposition of aluminum oxide on modified steel substrates",

author = "Kaupo Kukli and Emma Salmi and Taivo J{\~o}giaas and Roberts Zabels and Mikael Schuisky and J{\"o}rgen Westlinder and Kenichiro Mizohata and Mikko Ritala and Markku Leskel{\"a}",

year = "2016",

doi = "10.1016/j.surfcoat.2016.06.064",

language = "English",

volume = "304",

pages = "1--8",

journal = "Surface and Coatings Technology",

issn = "0257-8972",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Atomic layer deposition of aluminum oxide on modified steel substrates

AU - Kukli, Kaupo

AU - Salmi, Emma

AU - Jõgiaas, Taivo

AU - Zabels, Roberts

AU - Schuisky, Mikael

AU - Westlinder, Jörgen

AU - Mizohata, Kenichiro

AU - Ritala, Mikko

AU - Leskelä, Markku

PY - 2016

Y1 - 2016

UR - https://www.sciencedirect.com/science/article/pii/S0257897216305564

U2 - 10.1016/j.surfcoat.2016.06.064

DO - 10.1016/j.surfcoat.2016.06.064

M3 - Article

SN - 0257-8972

VL - 304

SP - 1

EP - 8

JO - Surface and Coatings Technology

JF - Surface and Coatings Technology

ER -

Atomic layer deposition of aluminum oxide on modified steel substrates

OECD Field of Science

Access to Document

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