Abstract
Barium metaplumbate thin films were deposited in situ by pulsed laser deposition on Si/SiO 2 and Si/SiO 2 /Ti/Pt substrates between 400C and 700C. Films prepared at low temperature ( ≤ 500C) over platinum were randomly oriented. For depositions made at 2 × 10 -2 mbar of oxygen, the films were oriented (110) for all temperatures, while at 0.1 mbar the films were oriented (110) at 500C, changing to a mixed (222)/(200) orientation above 550C. The conductivity of BaPbO 3 reached values of 5.6 × 10-5 ω cm. The films deposited directly over silica were polycrystalline for temperatures above 500C, having a strong (110) orientation only at 700C. The orientation of BaPbO 3 deposited either on silica or platinum, was reflected on the PZT films deposited at room temperature over BaPbO 3 and crystallized by different thermal treatments. PZT capacitors made over BaPbO 3 presented high values of remnant polarization (up to 44 μ C/cm 2 ).
| Original language | English |
|---|---|
| Pages (from-to) | 177-188 |
| Number of pages | 12 |
| Journal | Ferroelectrics |
| Volume | 293 |
| DOIs | |
| Publication status | Published - 1 Jun 2003 |
| Externally published | Yes |
Keywords
- Capacitors
- Conductive oxides
- Electrodes
- Ferroelectric properties
- Laser ablation
- Thin films
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