Characterization of PZT thin films for micromotors

P. Muralt; A. Kholkin; M. Kohli; T. Maeder; N. Setter

doi:10.1016/0167-9317(95)00116-6

Characterization of PZT thin films for micromotors

P. Muralt^*
, A. Kholkin
, M. Kohli
, T. Maeder
, N. Setter

^*Corresponding author for this work

Ecole Politechnique Federale

Research output: Contribution to journal › Article › peer-review

38 Citations (Scopus)

Abstract

Piezoelectric membranes consisting of sputter deposited PbZr_xTi_1-xO₃ (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d₃₁≈40 pm/V). The latter was also derived from the quasi-static deflections.

Original language	English
Pages (from-to)	67-70
Number of pages	4
Journal	Microelectronic Engineering
Volume	29
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(95)00116-6
Publication status	Published - Dec 1995
Externally published	Yes

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title = "Characterization of PZT thin films for micromotors",

abstract = "Piezoelectric membranes consisting of sputter deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d31≈40 pm/V). The latter was also derived from the quasi-static deflections.",

author = "P. Muralt and A. Kholkin and M. Kohli and T. Maeder and N. Setter",

year = "1995",

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doi = "10.1016/0167-9317(95)00116-6",

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AU - Muralt, P.

AU - Kholkin, A.

AU - Kohli, M.

AU - Maeder, T.

AU - Setter, N.

PY - 1995/12

Y1 - 1995/12

N2 - Piezoelectric membranes consisting of sputter deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d31≈40 pm/V). The latter was also derived from the quasi-static deflections.

AB - Piezoelectric membranes consisting of sputter deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been investigated for their resonance and piezoelectrical properties, in view of their application as stator of a micromotor. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias, in order to derive the total stress in the films and the piezoelectric coupling constant (d31≈40 pm/V). The latter was also derived from the quasi-static deflections.

UR - https://www.scopus.com/pages/publications/0029521874

U2 - 10.1016/0167-9317(95)00116-6

DO - 10.1016/0167-9317(95)00116-6

M3 - Article

AN - SCOPUS:0029521874

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VL - 29

SP - 67

EP - 70

JO - Microelectronic Engineering

JF - Microelectronic Engineering

IS - 1-4

ER -

Characterization of PZT thin films for micromotors

Abstract

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