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Comparison between 2D and 3D modelling of HF electromagnetic field in FZ Silicon Crystal growth process

  • Andris Muižnieks
  • , Uģis Lācis
  • , Andis Rudevičs

    Research output: Chapter in Book/Report/Conference proceedingConference paperResearch

    Original languageEnglish
    Title of host publicationProceedings of the 6th International Scientific Colloquium Modelling for Material Processing : Riga, September 16-17, 2010
    Place of PublicationRīga
    PublisherUniversity of Latvia
    Pages61-65
    Publication statusPublished - 2010

    OECD Field of Science

    • 1.3 Physical Sciences

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