Crucial dependence of excimer laser toughness of "wet" silica on excess oxygen

Creation of point defects by ArF (6.4 eV) and F₂ laser (7.9 eV) irradiation in synthetic "wet" silica glass thermally loaded with interstitial O₂ molecules was studied by optical absorption, electron paramagnetic resonance and infrared absorption. The presence of excess oxygen caused a significant increase of laser-induced ultraviolet (UV) absorption, which was 4 times (7.9 eV-irradiation) and > 20 times stronger (ArF irradiation) as compared to O₂-free samples. The spectral shape of photoinduced absorption nearly completely coincided with the spectral shape of oxygen dangling bonds (NBOHC) in 3 to 6.5 eV regions. The contribution of Si dangling bonds (E' centers) was less than few % and was not dependent on oxygen content. Peroxy radical defects were not detected. The photoinduced NBOHCs thermally decayed at 400.500 C. However, a subsequent brief 7.9 eV irradiation restored their concentration up to 70%. This sensitization can be in part attributed to generation of interstitial Cl₂ and HCl. These data show that oxygen stoichiometry is an important factor for maximizing laser toughness of wet silica.