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Crystal growth melt flow control by means of magnetic fields

  • V. Galindo
  • , G. Gerbeth*
  • , W. Von Ammon
  • , E. Tomzig
  • , J. Virbulis
  • *Corresponding author for this work
  • Helmholtz-Zentrum Dresden-Rossendorf
  • Siltronic AG

Research output: Contribution to journalArticlepeer-review

39 Citations (Scopus)

Abstract

Contactless melt flow control is important in many crystal growth technologies. Typically, steady magnetic fields are used to damp convective flow. On the other hand active flow driving forces like in a rotating magnetic field can be of stabilizing character, too. We present numerical results for the combined action of steady and alternating magnetic fields for the silicon Czochralski crystal growth process. The melt flow is determined by various flow driving sources: besides the thermal convection and rotation of crystal and crucible, there are also the influence of driving and/or damping electromagnetic forces and the thermocapillarity-driven flow at the free deformable melt surface.

Original languageEnglish
Pages (from-to)309-316
Number of pages8
JournalEnergy Conversion and Management
Volume43
Issue number3
DOIs
Publication statusPublished - Feb 2002
Externally publishedYes

Keywords

  • Crystal growth
  • Flow control
  • Magnetic fields

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