Dopeeritud ALN-nanopulbrite valmistustehnoloogia ja töötlemine

The aim of this work is improvement of sinterability of aluminium nitride by combining spark plasma sintering with using nanosized particulate composites prepared by simultaneous evaporation of Al and Y²O³, Gd²O³ and YF³ additives in radio-frequency nitrogen plasma. This approach allows to fabricate fully dense AlN materials at 1400°C with holding time of 2 min despite the reduction of rare-earth compounds and formation of YN and GdN phases in the plasma flow. Besides AlN phase, the prepared materials contain secondary phases aluminium oxynitride, Y³Al⁵O¹², GdA^lO³ or α-Al²O³, depending on the used additive.