Abstract
The presented study is focused on laboratory Czochralski crystal growth experiments and their mathematical modelling. The developed small-scale CZ crystal growth furnace is described as well as the involved automation systems: crystal radius detection by image recognition, temperature sensors, adjustable heater power and crystal pull rate. The CZ-Trans program is used to model the experimental results – transient, 2D axisymmetric simulation software primarily used for modelling of the industrial-scale silicon crystal growth process. Poor agreement with the experimental results is reached; however, the proven ability to perform affordable, small-scale experiments and successfully model their transient behavior, creates a possibility to develop new process automation solutions in the future.
| Original language | English |
|---|---|
| Pages (from-to) | 191-194 |
| Number of pages | 4 |
| Journal | Journal of Crystal Growth |
| Volume | 522 |
| DOIs | |
| Publication status | Published - 15 Sept 2019 |
Keywords
- A1. Computer simulation
- A1. Heat transfer
- A2. Czochralski method
- A2. Growth from melt
- B1. Halides
- B1. Salts
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