Fabrication and characterization of PZT thin films for micromotors

Paul Muralt; Andrei Kholkin; Markus Kohli; Thomas Maeder; Keith G. Brooks; R. Luthier; N. Setter

Fabrication and characterization of PZT thin films for micromotors

Paul Muralt^*
, Andrei Kholkin
, Markus Kohli
, Thomas Maeder
, Keith G. Brooks
, R. Luthier
, N. Setter

^*Corresponding author for this work

Swiss Federal Institute of Technology Lausanne

Research output: Contribution to conference › Paper › peer-review

4 Citations (Scopus)

Abstract

Piezoelectric membranes consisting of sputter and sol-gel deposited PbZr_xTi_1-xO₃ (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias. Membranes of 4 mm diameter have been successfully applied as stator of a micro motor. The motor could be operated with voltages as low as 1.0 V_rms. A 100 h degradation test of resonance frequency and amplitude has revealed a 5% drop in amplitude, possibly due to depolarization.

Original language	English
Pages	397-400
Number of pages	4
Publication status	Published - 1995
Externally published	Yes
Event	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden Duration: 25 Jun 1995 → 29 Jun 1995

Conference

Conference	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
City	Stockholm, Sweden
Period	25/06/95 → 29/06/95

Cite this

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title = "Fabrication and characterization of PZT thin films for micromotors",

abstract = "Piezoelectric membranes consisting of sputter and sol-gel deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias. Membranes of 4 mm diameter have been successfully applied as stator of a micro motor. The motor could be operated with voltages as low as 1.0 Vrms. A 100 h degradation test of resonance frequency and amplitude has revealed a 5\% drop in amplitude, possibly due to depolarization.",

author = "Paul Muralt and Andrei Kholkin and Markus Kohli and Thomas Maeder and Brooks, \{Keith G.\} and R. Luthier and N. Setter",

year = "1995",

language = "English",

pages = "397--400",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

TY - CONF

T1 - Fabrication and characterization of PZT thin films for micromotors

AU - Muralt, Paul

AU - Kholkin, Andrei

AU - Kohli, Markus

AU - Maeder, Thomas

AU - Brooks, Keith G.

AU - Luthier, R.

AU - Setter, N.

PY - 1995

Y1 - 1995

N2 - Piezoelectric membranes consisting of sputter and sol-gel deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias. Membranes of 4 mm diameter have been successfully applied as stator of a micro motor. The motor could be operated with voltages as low as 1.0 Vrms. A 100 h degradation test of resonance frequency and amplitude has revealed a 5% drop in amplitude, possibly due to depolarization.

AB - Piezoelectric membranes consisting of sputter and sol-gel deposited PbZrxTi1-xO3 (PZT) films on silicon diaphragms have been fabricated, investigated, and applied for micromotors. The behavior of resonance frequencies was studied as a function of membrane thickness and dc-bias. Membranes of 4 mm diameter have been successfully applied as stator of a micro motor. The motor could be operated with voltages as low as 1.0 Vrms. A 100 h degradation test of resonance frequency and amplitude has revealed a 5% drop in amplitude, possibly due to depolarization.

UR - https://www.scopus.com/pages/publications/0029519837

M3 - Paper

AN - SCOPUS:0029519837

SP - 397

EP - 400

T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Fabrication and characterization of PZT thin films for micromotors

Abstract

Conference

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