Femtosecond infrared laser annealing of PZT films on a metal substrate

N. Yu Firsova; E. D. Mishina; A. S. Sigov; S. V. Senkevich; I. P. Pronin; A. Kholkin; I. Bdikin; Yu I. Yuzyuk

doi:10.1080/00150193.2012.696459

Femtosecond infrared laser annealing of PZT films on a metal substrate

N. Yu Firsova
, E. D. Mishina
, A. S. Sigov^*
, S. V. Senkevich
, I. P. Pronin
, A. Kholkin
, I. Bdikin
, Yu I. Yuzyuk

^*Corresponding author for this work

MIREA - Russian Technological University
Ioffe Physico-Technical Institute
University of Aveiro
Southern Federal University

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

The quazi-amorphous PbZrTiO ₂ (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.

Original language	English
Pages (from-to)	164-169
Number of pages	6
Journal	Ferroelectrics
Volume	433
Issue number	1
DOIs	https://doi.org/10.1080/00150193.2012.696459
Publication status	Published - 1 Jan 2012
Externally published	Yes

Keywords

femtosecond laser annealing
ferroelectric
piezoelectric
Raman scattering
second harmonic generation
Sol-gel
thin films

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10.1080/00150193.2012.696459

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title = "Femtosecond infrared laser annealing of PZT films on a metal substrate",

abstract = "The quazi-amorphous PbZrTiO 2 (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.",

keywords = "femtosecond laser annealing, ferroelectric, piezoelectric, Raman scattering, second harmonic generation, Sol-gel, thin films",

author = "\{Yu Firsova\}, N. and Mishina, \{E. D.\} and Sigov, \{A. S.\} and Senkevich, \{S. V.\} and Pronin, \{I. P.\} and A. Kholkin and I. Bdikin and Yuzyuk, \{Yu I.\}",

year = "2012",

month = jan,

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doi = "10.1080/00150193.2012.696459",

language = "English",

volume = "433",

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journal = "Ferroelectrics",

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TY - JOUR

T1 - Femtosecond infrared laser annealing of PZT films on a metal substrate

AU - Yu Firsova, N.

AU - Mishina, E. D.

AU - Sigov, A. S.

AU - Senkevich, S. V.

AU - Pronin, I. P.

AU - Kholkin, A.

AU - Bdikin, I.

AU - Yuzyuk, Yu I.

PY - 2012/1/1

Y1 - 2012/1/1

N2 - The quazi-amorphous PbZrTiO 2 (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.

AB - The quazi-amorphous PbZrTiO 2 (PZT) precursor film on a platinized silicon substrate is annealed by femtosecond laser at the wavelength falling into transparency band of PZT. Two areas are found within the laser spot: ferroelectric perovskite revealing strong hysteresis and coercivity in piezoelectric response and paraelectric with low piezoresponse and the absence of hysteresis and coercivity. Annealing takes place through platinum absorbing laser irradiation and acting as a heat source for transparent film on top of it.

KW - femtosecond laser annealing

KW - ferroelectric

KW - piezoelectric

KW - Raman scattering

KW - second harmonic generation

KW - Sol-gel

KW - thin films

UR - https://www.scopus.com/pages/publications/84866875056

U2 - 10.1080/00150193.2012.696459

DO - 10.1080/00150193.2012.696459

M3 - Article

AN - SCOPUS:84866875056

SN - 0015-0193

VL - 433

SP - 164

EP - 169

JO - Ferroelectrics

JF - Ferroelectrics

IS - 1

ER -

Femtosecond infrared laser annealing of PZT films on a metal substrate

Abstract

Keywords

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