Micromechanical Properties of AlN, TiN and AlN/TiN Nanostructured Multilayer Coatings

F. Muktepavela; I. Manika; L. Grigorjeva; V. Skvortsova

doi:10.1117/12.515693

Micromechanical Properties of AlN, TiN and AlN/TiN Nanostructured Multilayer Coatings

F. Muktepavela^*
, I. Manika
, L. Grigorjeva
, V. Skvortsova

^*Corresponding author for this work

University of Latvia

Research output: Contribution to journal › Conference article › peer-review

3 Citations (Scopus)

Abstract

Coatings of AlN, TiN and nanostructured multilayer AlN/TiN have been deposited by reactive sputtering on sapphire, tungsten carbide (WC) and stainless steel substrates. The microhardness, adhesion and formation of cracks under indentation tests, were investigated. It was found that the adhesion of coatings on steel was higher, than on WC for all investigated samples. Nanostructured multilayer AlN/TiN films have the best adhesion and fracture toughness both on the hard (WC) and on the soft (stainless steel) substrates if compared with that for AlN and TiN "single layer" coatings. The effect of γ-radiation on mechanical properties of transparent AlN films was investigated. After the exposure of γ-radiation (10⁶ Gy) the microhardness of AlN has increased by 33%. No debonding or destruction of AlN films under irradiation was observed.

Original language	English
Pages (from-to)	434-439
Number of pages	6
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5122
DOIs	https://doi.org/10.1117/12.515693
Publication status	Published - 2002
Event	PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials - Riga, Latvia Duration: 19 Aug 2002 → 22 Aug 2002

Keywords

Al/TiN multilayer coatings
AlN
Microhardness
TiN

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10.1117/12.515693

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title = "Micromechanical Properties of AlN, TiN and AlN/TiN Nanostructured Multilayer Coatings",

abstract = "Coatings of AlN, TiN and nanostructured multilayer AlN/TiN have been deposited by reactive sputtering on sapphire, tungsten carbide (WC) and stainless steel substrates. The microhardness, adhesion and formation of cracks under indentation tests, were investigated. It was found that the adhesion of coatings on steel was higher, than on WC for all investigated samples. Nanostructured multilayer AlN/TiN films have the best adhesion and fracture toughness both on the hard (WC) and on the soft (stainless steel) substrates if compared with that for AlN and TiN {"}single layer{"} coatings. The effect of γ-radiation on mechanical properties of transparent AlN films was investigated. After the exposure of γ-radiation (106 Gy) the microhardness of AlN has increased by 33\%. No debonding or destruction of AlN films under irradiation was observed.",

keywords = "Al/TiN multilayer coatings, AlN, Microhardness, TiN",

author = "F. Muktepavela and I. Manika and L. Grigorjeva and V. Skvortsova",

year = "2002",

doi = "10.1117/12.515693",

language = "English",

volume = "5122",

pages = "434--439",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials ; Conference date: 19-08-2002 Through 22-08-2002",

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TY - JOUR

T1 - Micromechanical Properties of AlN, TiN and AlN/TiN Nanostructured Multilayer Coatings

AU - Muktepavela, F.

AU - Manika, I.

AU - Grigorjeva, L.

AU - Skvortsova, V.

PY - 2002

Y1 - 2002

N2 - Coatings of AlN, TiN and nanostructured multilayer AlN/TiN have been deposited by reactive sputtering on sapphire, tungsten carbide (WC) and stainless steel substrates. The microhardness, adhesion and formation of cracks under indentation tests, were investigated. It was found that the adhesion of coatings on steel was higher, than on WC for all investigated samples. Nanostructured multilayer AlN/TiN films have the best adhesion and fracture toughness both on the hard (WC) and on the soft (stainless steel) substrates if compared with that for AlN and TiN "single layer" coatings. The effect of γ-radiation on mechanical properties of transparent AlN films was investigated. After the exposure of γ-radiation (106 Gy) the microhardness of AlN has increased by 33%. No debonding or destruction of AlN films under irradiation was observed.

AB - Coatings of AlN, TiN and nanostructured multilayer AlN/TiN have been deposited by reactive sputtering on sapphire, tungsten carbide (WC) and stainless steel substrates. The microhardness, adhesion and formation of cracks under indentation tests, were investigated. It was found that the adhesion of coatings on steel was higher, than on WC for all investigated samples. Nanostructured multilayer AlN/TiN films have the best adhesion and fracture toughness both on the hard (WC) and on the soft (stainless steel) substrates if compared with that for AlN and TiN "single layer" coatings. The effect of γ-radiation on mechanical properties of transparent AlN films was investigated. After the exposure of γ-radiation (106 Gy) the microhardness of AlN has increased by 33%. No debonding or destruction of AlN films under irradiation was observed.

KW - Al/TiN multilayer coatings

KW - AlN

KW - Microhardness

KW - TiN

UR - https://www.scopus.com/pages/publications/0344082117

U2 - 10.1117/12.515693

DO - 10.1117/12.515693

M3 - Conference article

AN - SCOPUS:0344082117

SN - 0277-786X

VL - 5122

SP - 434

EP - 439

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials

Y2 - 19 August 2002 through 22 August 2002

ER -

Micromechanical Properties of AlN, TiN and AlN/TiN Nanostructured Multilayer Coatings

Abstract

Keywords

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