Nanostructures formation on surface of 6H-SiC by N2 laser radiation

Artur Medvid; Baiba Berzina; Laima Trinklere; Leonid Fedorenko; Petro Lytvyn; VitaliyMalevich; Tomuo Yamaguchi; Mitsuru Aoyama

doi:10.1117/12.515692

Nanostructures formation on surface of 6H-SiC by N₂ laser radiation

Artur Medvid^*
, Baiba Berzina
, Laima Trinklere
, Leonid Fedorenko
, Petro Lytvyn
, VitaliyMalevich
, Tomuo Yamaguchi
, Mitsuru Aoyama

^*Corresponding author for this work

Riga Technical University
NASU - Institute of Semiconductors Physics
Shizuoka University

Research output: Contribution to journal › Conference article › peer-review

Abstract

Nano-hills formation on a surface of 6H-S1C by the N₂ laser focused beam was found. These nano-hills are situated along the circular line with diameter smaller than that of the focused laser beam. Results of the photoluminescence and studies of Friction Force Microscopy speak in favor of the increase of nitrogen concentration in the nano-hills. For explanation of this phenomenon the pressure of liquid matter in the subsurface area and the pressure of the laser beam on the surface of the sample are taken into account. The threshold character of the effect, accumulation effect and increase of N band on PL spectra testify to the main role of the Thermogradient Effect in this phenomenon.

Original language	English
Pages (from-to)	427-433
Number of pages	7
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	5122
DOIs	https://doi.org/10.1117/12.515692
Publication status	Published - 2002
Externally published	Yes
Event	PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials - Riga, Latvia Duration: 19 Aug 2002 → 22 Aug 2002

Keywords

Atomic Force Microscope
Laser
Nano-hils
Photoluminescence
SiC

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10.1117/12.515692

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title = "Nanostructures formation on surface of 6H-SiC by N2 laser radiation",

abstract = "Nano-hills formation on a surface of 6H-S1C by the N2 laser focused beam was found. These nano-hills are situated along the circular line with diameter smaller than that of the focused laser beam. Results of the photoluminescence and studies of Friction Force Microscopy speak in favor of the increase of nitrogen concentration in the nano-hills. For explanation of this phenomenon the pressure of liquid matter in the subsurface area and the pressure of the laser beam on the surface of the sample are taken into account. The threshold character of the effect, accumulation effect and increase of N band on PL spectra testify to the main role of the Thermogradient Effect in this phenomenon.",

keywords = "Atomic Force Microscope, Laser, Nano-hils, Photoluminescence, SiC",

author = "Artur Medvid and Baiba Berzina and Laima Trinklere and Leonid Fedorenko and Petro Lytvyn and VitaliyMalevich and Tomuo Yamaguchi and Mitsuru Aoyama",

year = "2002",

doi = "10.1117/12.515692",

language = "English",

volume = "5122",

pages = "427--433",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials ; Conference date: 19-08-2002 Through 22-08-2002",

}

TY - JOUR

T1 - Nanostructures formation on surface of 6H-SiC by N2 laser radiation

AU - Medvid, Artur

AU - Berzina, Baiba

AU - Trinklere, Laima

AU - Fedorenko, Leonid

AU - Lytvyn, Petro

AU - VitaliyMalevich,

AU - Yamaguchi, Tomuo

AU - Aoyama, Mitsuru

PY - 2002

Y1 - 2002

N2 - Nano-hills formation on a surface of 6H-S1C by the N2 laser focused beam was found. These nano-hills are situated along the circular line with diameter smaller than that of the focused laser beam. Results of the photoluminescence and studies of Friction Force Microscopy speak in favor of the increase of nitrogen concentration in the nano-hills. For explanation of this phenomenon the pressure of liquid matter in the subsurface area and the pressure of the laser beam on the surface of the sample are taken into account. The threshold character of the effect, accumulation effect and increase of N band on PL spectra testify to the main role of the Thermogradient Effect in this phenomenon.

AB - Nano-hills formation on a surface of 6H-S1C by the N2 laser focused beam was found. These nano-hills are situated along the circular line with diameter smaller than that of the focused laser beam. Results of the photoluminescence and studies of Friction Force Microscopy speak in favor of the increase of nitrogen concentration in the nano-hills. For explanation of this phenomenon the pressure of liquid matter in the subsurface area and the pressure of the laser beam on the surface of the sample are taken into account. The threshold character of the effect, accumulation effect and increase of N band on PL spectra testify to the main role of the Thermogradient Effect in this phenomenon.

KW - Atomic Force Microscope

KW - Laser

KW - Nano-hils

KW - Photoluminescence

KW - SiC

UR - https://www.scopus.com/pages/publications/0344552803

U2 - 10.1117/12.515692

DO - 10.1117/12.515692

M3 - Conference article

AN - SCOPUS:0344552803

SN - 0277-786X

VL - 5122

SP - 427

EP - 433

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - PROCEEDINGS OF SPIE SPIE - The International Society for Optical Engineering: Advanced Organic and Inorganic Optical Materials

Y2 - 19 August 2002 through 22 August 2002

ER -

Nanostructures formation on surface of 6H-SiC by N₂ laser radiation

Abstract

Keywords

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