Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth

I. Yu Evstratov; V. V. Kalaev; A. I. Zhmakin; Yu N. Makarov; A. G. Abramov; N. G. Ivanov; A. B. Korsakov; E. M. Smirnov; E. Dornberger; J. Virbulis; E. Tomzig; W. Von Ammon

doi:10.1016/S0022-0248(01)02327-2

Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth

I. Yu Evstratov
, V. V. Kalaev
, A. I. Zhmakin
, Yu N. Makarov
, A. G. Abramov
, N. G. Ivanov
, A. B. Korsakov
, E. M. Smirnov
, E. Dornberger
, J. Virbulis
, E. Tomzig
, W. Von Ammon

Soft-Impact Ltd.
Semiconductor Technology Research Corporation
Peter the Great St. Petersburg Polytechnic University
Siltronic AG

Research output: Contribution to journal › Article › peer-review

23 Citations (Scopus)

Abstract

We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection are studied in an industrial configuration.

Original language	English
Pages (from-to)	1757-1761
Number of pages	5
Journal	Journal of Crystal Growth
Volume	237-239
Issue number	1-4
DOIs	https://doi.org/10.1016/S0022-0248(01)02327-2
Publication status	Published - Apr 2002
Externally published	Yes

Keywords

A1. Magnetic fields
A1. Turbulent convection
A2. Czochralski method
B1. Silicon

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10.1016/S0022-0248(01)02327-2

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Evstratov, I. Y., Kalaev, V. V., Zhmakin, A. I., Makarov, Y. N., Abramov, A. G., Ivanov, N. G., Korsakov, A. B., Smirnov, E. M., Dornberger, E., Virbulis, J., Tomzig, E., & Von Ammon, W. (2002). Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth. Journal of Crystal Growth, 237-239(1-4), 1757-1761. https://doi.org/10.1016/S0022-0248(01)02327-2

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title = "Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth",

abstract = "We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection are studied in an industrial configuration.",

keywords = "A1. Magnetic fields, A1. Turbulent convection, A2. Czochralski method, B1. Silicon",

author = "Evstratov, \{I. Yu\} and Kalaev, \{V. V.\} and Zhmakin, \{A. I.\} and Makarov, \{Yu N.\} and Abramov, \{A. G.\} and Ivanov, \{N. G.\} and Korsakov, \{A. B.\} and Smirnov, \{E. M.\} and E. Dornberger and J. Virbulis and E. Tomzig and \{Von Ammon\}, W.",

year = "2002",

month = apr,

doi = "10.1016/S0022-0248(01)02327-2",

language = "English",

volume = "237-239",

pages = "1757--1761",

journal = "Journal of Crystal Growth",

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TY - JOUR

T1 - Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth

AU - Evstratov, I. Yu

AU - Kalaev, V. V.

AU - Zhmakin, A. I.

AU - Makarov, Yu N.

AU - Abramov, A. G.

AU - Ivanov, N. G.

AU - Korsakov, A. B.

AU - Smirnov, E. M.

AU - Dornberger, E.

AU - Virbulis, J.

AU - Tomzig, E.

AU - Von Ammon, W.

PY - 2002/4

Y1 - 2002/4

N2 - We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection are studied in an industrial configuration.

AB - We present a computational model of 3D turbulent melt convection in Czochralski Si-crystal growth systems, based on the hybridization of Reynolds-averaged approach and large eddy simulation. The effect of superimposed magnetic field action on the melt flow is introduced in the model to account for the suppression of turbulent melt fluctuations. The model has been verified using experimental data for temperature in the melt and along the melt-crucible surface. Effects of axial magnetic field on the change in melt convection are studied in an industrial configuration.

KW - A1. Magnetic fields

KW - A1. Turbulent convection

KW - A2. Czochralski method

KW - B1. Silicon

UR - https://www.scopus.com/pages/publications/0036530467

U2 - 10.1016/S0022-0248(01)02327-2

DO - 10.1016/S0022-0248(01)02327-2

M3 - Article

AN - SCOPUS:0036530467

SN - 0022-0248

VL - 237-239

SP - 1757

EP - 1761

JO - Journal of Crystal Growth

JF - Journal of Crystal Growth

IS - 1-4

ER -

Numerical study of 3D unsteady melt convection during industrial-scale CZ Si-crystal growth

Abstract

Keywords

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