Optical properties of ultrathin Al2O3/ZnO nanolaminates

R. Viter; I. Baleviciute; A. Abou Chaaya; L. Mikoliunaite; Z. Balevicius; A. Ramanavicius; A. Zalesska; V. Vataman; V. Smyntyna; Z. Gertnere; D. Erts; P. Miele; M. Bechelany

doi:10.1016/j.tsf.2015.10.018

Optical properties of ultrathin Al₂O₃/ZnO nanolaminates

R. Viter
, I. Baleviciute
, A. Abou Chaaya
, L. Mikoliunaite
, Z. Balevicius
, A. Ramanavicius
, A. Zalesska
, V. Vataman
, V. Smyntyna
, Z. Gertnere
, D. Erts
, P. Miele
, M. Bechelany^*

^*Corresponding author for this work

Odessa National University
Vilnius University
Center for Physical Sciences and Technology
Université de Montpellier
Vilnius Gediminas Technical University

Research output: Contribution to journal › Article › peer-review

26 Citations (Scopus)

Abstract

Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al₂O₃/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested.

Original language	English
Pages (from-to)	96-100
Number of pages	5
Journal	Thin Solid Films
Volume	594
DOIs	https://doi.org/10.1016/j.tsf.2015.10.018
Publication status	Published - 2015

Keywords

Amorphous nanolaminates
Atomic Layer Deposition
Optical properties
Ultrathin films
ZnO

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10.1016/j.tsf.2015.10.018

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title = "Optical properties of ultrathin Al2O3/ZnO nanolaminates",

abstract = "Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested.",

keywords = "Amorphous nanolaminates, Atomic Layer Deposition, Optical properties, Ultrathin films, ZnO",

author = "R. Viter and I. Baleviciute and \{Abou Chaaya\}, A. and L. Mikoliunaite and Z. Balevicius and A. Ramanavicius and A. Zalesska and V. Vataman and V. Smyntyna and Z. Gertnere and D. Erts and P. Miele and M. Bechelany",

year = "2015",

doi = "10.1016/j.tsf.2015.10.018",

language = "English",

volume = "594",

pages = "96--100",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Optical properties of ultrathin Al2O3/ZnO nanolaminates

AU - Viter, R.

AU - Baleviciute, I.

AU - Abou Chaaya, A.

AU - Mikoliunaite, L.

AU - Balevicius, Z.

AU - Ramanavicius, A.

AU - Zalesska, A.

AU - Vataman, V.

AU - Smyntyna, V.

AU - Gertnere, Z.

AU - Erts, D.

AU - Miele, P.

AU - Bechelany, M.

PY - 2015

Y1 - 2015

N2 - Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested.

AB - Because of their high resistance against ultraviolet and high energy particles, ultrathin amorphous nanolaminates can be very attractive for aerospace application. Here we report on the optical and structural properties of ultrathin Al2O3/ZnO nanolaminates deposited by Atomic Layer Deposition. Structural properties of nanolaminates were studied by GIXRD and AFM. Optical characterization was performed by transmittance, spectroscopic ellipsometry and photoluminescence (PL) spectroscopy. Regression analysis of ellipsometric spectra has shown that absorption peak decreases and blue shifted with the decrease of bilayer thickness in the stack. On the basis of the analysis of structural and optical properties of ultrathin nanolaminates, the amorphous nature of them is suggested.

KW - Amorphous nanolaminates

KW - Atomic Layer Deposition

KW - Optical properties

KW - Ultrathin films

KW - ZnO

UR - https://www.scopus.com/pages/publications/84955276128

U2 - 10.1016/j.tsf.2015.10.018

DO - 10.1016/j.tsf.2015.10.018

M3 - Article

AN - SCOPUS:84955276128

SN - 0040-6090

VL - 594

SP - 96

EP - 100

JO - Thin Solid Films

JF - Thin Solid Films

ER -

Optical properties of ultrathin Al₂O₃/ZnO nanolaminates

Abstract

Keywords

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