Patterned laser crystallization of a-Si

B. Polyakov; G. Marcins; M. Chubarov; A. Kuzmin; V. Klykov; I. Tale

doi:10.2478/v10047-009-0009-y

Patterned laser crystallization of a-Si

B. Polyakov^*
, G. Marcins
, M. Chubarov
, A. Kuzmin
, V. Klykov
, I. Tale

^*Corresponding author for this work

University of Latvia
Sidrabe Inc.

Research output: Contribution to journal › Article › peer-review

2 Citations (Scopus)

Abstract

Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.

Original language	English
Pages (from-to)	50-54
Number of pages	5
Journal	Latvian Journal of Physics and Technical Sciences
Volume	46
Issue number	3
DOIs	https://doi.org/10.2478/v10047-009-0009-y
Publication status	Published - 1 Jan 2009

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title = "Patterned laser crystallization of a-Si",

abstract = "Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.",

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AU - Polyakov, B.

AU - Marcins, G.

AU - Chubarov, M.

AU - Kuzmin, A.

AU - Klykov, V.

AU - Tale, I.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.

AB - Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.

UR - https://www.scopus.com/pages/publications/68149101461

U2 - 10.2478/v10047-009-0009-y

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M3 - Article

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JF - Latvian Journal of Physics and Technical Sciences

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Patterned laser crystallization of a-Si

Abstract

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