Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy

V. V. Shvartsman; A. V. Pankrashkin; V. P. Afanasjev; E. Yu Kaptelov; I. P. Pronin; A. L. Kholkin

doi:10.1080/10584580590897344

Piezoelectric properties of self-polarized Pb(Zr_xTi _1-x)O₃ thin films probed by scanning force microscopy

V. V. Shvartsman^*
, A. V. Pankrashkin
, V. P. Afanasjev
, E. Yu Kaptelov
, I. P. Pronin
, A. L. Kholkin

^*Corresponding author for this work

University of Aveiro
St. Petersburg State Electrotechnical University
Ioffe Physico-Technical Institute

Research output: Contribution to journal › Conference article › peer-review

13 Citations (Scopus)

Abstract

Self'-polarization effect was observed in Pb(Zr_0.54Ti _0.46)O₃ (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO₂/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

Original language	English
Pages (from-to)	103-111
Number of pages	9
Journal	Integrated Ferroelectrics
Volume	69
DOIs	https://doi.org/10.1080/10584580590897344
Publication status	Published - 2005
Externally published	Yes
Event	16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Korea, Republic of Duration: 5 Apr 2004 → 8 Apr 2004

Access to Document

10.1080/10584580590897344

Cite this

@article{f103743d15e74afb9b0429624c2bee74,

title = "Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy",

abstract = "Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol\% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.",

author = "Shvartsman, \{V. V.\} and Pankrashkin, \{A. V.\} and Afanasjev, \{V. P.\} and Kaptelov, \{E. Yu\} and Pronin, \{I. P.\} and Kholkin, \{A. L.\}",

year = "2005",

doi = "10.1080/10584580590897344",

language = "English",

volume = "69",

pages = "103--111",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

note = "16th International Symposium on Integrated Ferroelectrics, ISIF-16 ; Conference date: 05-04-2004 Through 08-04-2004",

}

TY - JOUR

T1 - Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy

AU - Shvartsman, V. V.

AU - Pankrashkin, A. V.

AU - Afanasjev, V. P.

AU - Kaptelov, E. Yu

AU - Pronin, I. P.

AU - Kholkin, A. L.

PY - 2005

Y1 - 2005

N2 - Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

AB - Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

UR - https://www.scopus.com/pages/publications/33644795364

U2 - 10.1080/10584580590897344

DO - 10.1080/10584580590897344

M3 - Conference article

AN - SCOPUS:33644795364

SN - 1058-4587

VL - 69

SP - 103

EP - 111

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

T2 - 16th International Symposium on Integrated Ferroelectrics, ISIF-16

Y2 - 5 April 2004 through 8 April 2004

ER -

Piezoelectric properties of self-polarized Pb(Zr_xTi _1-x)O₃ thin films probed by scanning force microscopy

Abstract

Access to Document

Other files and links

Fingerprint

Cite this