@inproceedings{6984fcfd27ee414f87f2ee0abee9edc5,
title = "Piezoelectric PZT thin films on flexible copper-coated polymer films",
abstract = "This work analyzes the processing of Pb(Zr,Ti)O3 (PZT) thin films directly on coppercoated polymer films. PZT thin film deposition was performed onto the metallized Kapton{\textregistered} films using a single RF plasma jet. In order to reduce the interaction of PZT and Cu during the initial growth stage, an ultrathin amorphous TiO2-x seeding layer was sputter-deposited prior to PZT deposition. The film texture was a mixture of (111)-oriented perovskite nanocrystals, rutile and pyrochlore. Topography and piezoelectric in-plane and out-of-plane response of the films were evaluated using a commercial AFM adapted for piezoforce measurements. The as-deposited films were self-polarized with polarization pointing at the surface of the sample. Polarization was switchable and a piezoelectric hysteresis was obtained.",
keywords = "Kapton{\textregistered} film substrate, PZT, Piezoresponse force microscopy, Plasma jet deposition",
author = "G. Suchaneck and O. Volkonskiy and G. Gerlach and Z. Hubicka and A. Dejneka and L. Jastrab{\'i}k and D. Kiselev and I. Bdikin and A. Kholkin",
year = "2010",
doi = "10.4028/www.scientific.net/MSF.636-637.392",
language = "English",
isbn = "0878492887",
series = "Materials Science Forum",
publisher = "Trans Tech Publications Ltd",
pages = "392--397",
editor = "Rosa, \{Luis Guerra\} and Rosa, \{Luis Guerra\} and Fernanda Margarido and Fernanda Margarido",
booktitle = "Advanced Materials Forum V",
address = "Switzerland",
note = "5th International Materials Symposium MATERIAiS 2009 - 14th meeting of SPM - Sociedade Portuguesa de Materiais ; Conference date: 05-04-2009 Through 08-04-2009",
}