TY - GEN
T1 - Simple method for measuring bilayer system optical parameters
AU - Nitiss, E.
AU - Usans, R.
AU - Rutkis, M.
PY - 2012
Y1 - 2012
N2 - A simple method for measuring bilayer system refractive indexes and thicknesses in the low absorbing part of spectra is demonstrated. The method is based on application of Savitzky - Golay smoothing filters and interference fringe separation in the reflected or transmitted spectra of the bilayer system. The refractive indexes and thicknesses are extracted from the wavelengths corresponding to extreme points in the spectrum. Due to the fact that wavelength difference of extreme points in the analyzed spectrum is defined by the product of both, the layer thickness and refractive index, one must generate an appropriate initial guess of these parameters. For refractive index approximation two different methods have been used - point by point and Sellmeier dispersion relation. The final optimization procedure is based on a priori assumption that the thickness calculated from permutations of all extreme points in the spectrum should be the same. Thus the optimal penalty parameter for finding the solution is the standard deviation of calculated thicknesses. In order to demonstrate the effectiveness of this simple method, results of thin organic film thicknesses and refractive indexes are presented.
AB - A simple method for measuring bilayer system refractive indexes and thicknesses in the low absorbing part of spectra is demonstrated. The method is based on application of Savitzky - Golay smoothing filters and interference fringe separation in the reflected or transmitted spectra of the bilayer system. The refractive indexes and thicknesses are extracted from the wavelengths corresponding to extreme points in the spectrum. Due to the fact that wavelength difference of extreme points in the analyzed spectrum is defined by the product of both, the layer thickness and refractive index, one must generate an appropriate initial guess of these parameters. For refractive index approximation two different methods have been used - point by point and Sellmeier dispersion relation. The final optimization procedure is based on a priori assumption that the thickness calculated from permutations of all extreme points in the spectrum should be the same. Thus the optimal penalty parameter for finding the solution is the standard deviation of calculated thicknesses. In order to demonstrate the effectiveness of this simple method, results of thin organic film thicknesses and refractive indexes are presented.
UR - https://www.scopus.com/pages/publications/84862297468
UR - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8430/1/Simple-method-for-measuring-bilayer-system-optical-parameters/10.1117/12.922317.short
U2 - 10.1117/12.922317
DO - 10.1117/12.922317
M3 - Conference paper
AN - SCOPUS:84862297468
SN - 9780819491220
T3 - Proceedings of SPIE - The International Society for Optical Engineering
BT - Optical Micro- and Nanometrology IV
T2 - Optical Micro- and Nanometrology IV
Y2 - 16 April 2012 through 18 April 2012
ER -