Sol-gel processing of PNZST thin films on Ti/Pt and Ta/Pt metallizations

Cyril Voisard; Keith G. Brooks; Ian M. Reaney; Laurent Sagalowicz; Andrei L. Kholkin; Nicolas Xanthopoulos; Nava Setter

doi:10.1016/s0955-2219(95)00221-9

Sol-gel processing of PNZST thin films on Ti/Pt and Ta/Pt metallizations

Cyril Voisard^*
, Keith G. Brooks
, Ian M. Reaney
, Laurent Sagalowicz
, Andrei L. Kholkin
, Nicolas Xanthopoulos
, Nava Setter

^*Corresponding author for this work

Swiss Federal Institute of Technology Lausanne
University of Sheffield

Research output: Contribution to journal › Article › peer-review

7 Citations (Scopus)

Abstract

Sol-gel processing parameters of Pb_0.99Zr_0.55Sn_0.37 Ti_0.06Nb_0.02O₃ thin films were studied. Effects of H₂O, HNO₃ and formamide additives on solution gelation and film properties were investigated. Thin films were prepared on Ti/Pt and Ta/Pt metallized Si substrates. Film microstructures were characterized using SEM, TEM/EDS and XPS. Film microstructures typically contained 'rosette' structures. Strain response of the films under applied electric fields was measured using a double beam interferometer. A piezoelectric double loop was obtained with an effective d₃₃ as high as 60 pm V^-1, being strongly AC field dependent. Double P-E hysteresis loops with maximum polarizations of 30 μC cm^-3 were measured. Field-induced antiferroelectric to ferroelectric phase switching was observed at 110 kV cm^-1 and reverse switching at 74 kV cm^-1. Films prepared on Ti/Pt yielded better electrical properties. This may be attributed to a change in nucleation/ crystallization mechanism due to Pb diffusion through the Pt during film annealing.

Original language	English
Pages (from-to)	1231-1238
Number of pages	8
Journal	Journal of the European Ceramic Society
Volume	17
Issue number	10
DOIs	https://doi.org/10.1016/s0955-2219(95)00221-9
Publication status	Published - Aug 1997
Externally published	Yes

Access to Document

10.1016/s0955-2219(95)00221-9

Cite this

@article{d1e14e3a0f114638a1ad38f15b492813,

title = "Sol-gel processing of PNZST thin films on Ti/Pt and Ta/Pt metallizations",

abstract = "Sol-gel processing parameters of Pb0.99Zr0.55Sn0.37 Ti0.06Nb0.02O3 thin films were studied. Effects of H2O, HNO3 and formamide additives on solution gelation and film properties were investigated. Thin films were prepared on Ti/Pt and Ta/Pt metallized Si substrates. Film microstructures were characterized using SEM, TEM/EDS and XPS. Film microstructures typically contained 'rosette' structures. Strain response of the films under applied electric fields was measured using a double beam interferometer. A piezoelectric double loop was obtained with an effective d33 as high as 60 pm V-1, being strongly AC field dependent. Double P-E hysteresis loops with maximum polarizations of 30 μC cm-3 were measured. Field-induced antiferroelectric to ferroelectric phase switching was observed at 110 kV cm-1 and reverse switching at 74 kV cm-1. Films prepared on Ti/Pt yielded better electrical properties. This may be attributed to a change in nucleation/ crystallization mechanism due to Pb diffusion through the Pt during film annealing.",

author = "Cyril Voisard and Brooks, \{Keith G.\} and Reaney, \{Ian M.\} and Laurent Sagalowicz and Kholkin, \{Andrei L.\} and Nicolas Xanthopoulos and Nava Setter",

year = "1997",

month = aug,

doi = "10.1016/s0955-2219(95)00221-9",

language = "English",

volume = "17",

pages = "1231--1238",

journal = "Journal of the European Ceramic Society",

issn = "0955-2219",

publisher = "Elsevier B.V.",

number = "10",

}

TY - JOUR

T1 - Sol-gel processing of PNZST thin films on Ti/Pt and Ta/Pt metallizations

AU - Voisard, Cyril

AU - Brooks, Keith G.

AU - Reaney, Ian M.

AU - Sagalowicz, Laurent

AU - Kholkin, Andrei L.

AU - Xanthopoulos, Nicolas

AU - Setter, Nava

PY - 1997/8

Y1 - 1997/8

N2 - Sol-gel processing parameters of Pb0.99Zr0.55Sn0.37 Ti0.06Nb0.02O3 thin films were studied. Effects of H2O, HNO3 and formamide additives on solution gelation and film properties were investigated. Thin films were prepared on Ti/Pt and Ta/Pt metallized Si substrates. Film microstructures were characterized using SEM, TEM/EDS and XPS. Film microstructures typically contained 'rosette' structures. Strain response of the films under applied electric fields was measured using a double beam interferometer. A piezoelectric double loop was obtained with an effective d33 as high as 60 pm V-1, being strongly AC field dependent. Double P-E hysteresis loops with maximum polarizations of 30 μC cm-3 were measured. Field-induced antiferroelectric to ferroelectric phase switching was observed at 110 kV cm-1 and reverse switching at 74 kV cm-1. Films prepared on Ti/Pt yielded better electrical properties. This may be attributed to a change in nucleation/ crystallization mechanism due to Pb diffusion through the Pt during film annealing.

AB - Sol-gel processing parameters of Pb0.99Zr0.55Sn0.37 Ti0.06Nb0.02O3 thin films were studied. Effects of H2O, HNO3 and formamide additives on solution gelation and film properties were investigated. Thin films were prepared on Ti/Pt and Ta/Pt metallized Si substrates. Film microstructures were characterized using SEM, TEM/EDS and XPS. Film microstructures typically contained 'rosette' structures. Strain response of the films under applied electric fields was measured using a double beam interferometer. A piezoelectric double loop was obtained with an effective d33 as high as 60 pm V-1, being strongly AC field dependent. Double P-E hysteresis loops with maximum polarizations of 30 μC cm-3 were measured. Field-induced antiferroelectric to ferroelectric phase switching was observed at 110 kV cm-1 and reverse switching at 74 kV cm-1. Films prepared on Ti/Pt yielded better electrical properties. This may be attributed to a change in nucleation/ crystallization mechanism due to Pb diffusion through the Pt during film annealing.

UR - https://www.scopus.com/pages/publications/0001339095

U2 - 10.1016/s0955-2219(95)00221-9

DO - 10.1016/s0955-2219(95)00221-9

M3 - Article

AN - SCOPUS:0001339095

SN - 0955-2219

VL - 17

SP - 1231

EP - 1238

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

IS - 10

ER -

Sol-gel processing of PNZST thin films on Ti/Pt and Ta/Pt metallizations

Abstract

Access to Document

Other files and links

Fingerprint

Cite this