Spectroscopic ellipsometry applied to phase transitions in solids: Possibilities and limitations

Alexandr Dejneka; Ilze Aulika; Vladimir Trepakov; Jaromir Krepelka; Lubomir Jastrabik; Zdenek Hubicka; Anna Lynnyk

doi:10.1364/OE.17.014322

Spectroscopic ellipsometry applied to phase transitions in solids: Possibilities and limitations

Alexandr Dejneka^*
, Ilze Aulika
, Vladimir Trepakov
, Jaromir Krepelka
, Lubomir Jastrabik
, Zdenek Hubicka
, Anna Lynnyk

^*Corresponding author for this work

Thin Films Laboratory, Institute of Solid State Physics

Czech Academy of Sciences
Joint Laboratory of UPOL and FZU AS CR

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

The possibilities of in situ spectroscopic ellipsometry applied to phase transitions investigation in oxide thin films and crystals are examined in this work, along with the use of various parameters calculated from ellipsometric data (band gap energy E_g, refractive index n and surface roughness) together with the directly measured main ellipsometric angles ψ and Δ, for the detection of phase transitions. The efficiency of spectroscopic ellipsometry on "surface" phase transition and its sensitivity to surface defects are also demonstrated.

Original language	English
Pages (from-to)	14322-14338
Number of pages	17
Journal	Optics Express
Volume	17
Issue number	16
DOIs	https://doi.org/10.1364/OE.17.014322
Publication status	Published - 3 Aug 2009

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10.1364/OE.17.014322

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AU - Dejneka, Alexandr

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AU - Trepakov, Vladimir

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AU - Jastrabik, Lubomir

AU - Hubicka, Zdenek

AU - Lynnyk, Anna

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AB - The possibilities of in situ spectroscopic ellipsometry applied to phase transitions investigation in oxide thin films and crystals are examined in this work, along with the use of various parameters calculated from ellipsometric data (band gap energy Eg, refractive index n and surface roughness) together with the directly measured main ellipsometric angles ψ and Δ, for the detection of phase transitions. The efficiency of spectroscopic ellipsometry on "surface" phase transition and its sensitivity to surface defects are also demonstrated.

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Spectroscopic ellipsometry applied to phase transitions in solids: Possibilities and limitations

Abstract

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