Study of inductive coupled hydrogen and argon plasma interaction with SiO₂ glass

This work is devoted to the diagnostics of interaction between hydrogen and argon with the surface of SiO₂ glass walls. For diagnostics of the interaction, special high-frequency electrodeless light sources were prepared, filled with pure argon of 1 Torr or argon-hydrogen of total pressure of 1 Torr (Ar/H₂ mixing ratio is 9:1). Besides the mostly used spherical and cylindrical lamps, dumbbell type lamps have also been investigated. The spectroscopic and AFM measurements showed that in comparison with pure argon plasma, the argon-hydrogen plasma causes non-uniform changes of the SiO ₂ surface. For these modifications active OH are primarily responsible molecules, created in the reactions of hydrogen molecules with oxygen molecules, adsorbed from the walls.