Study of the high-frequency inductive coupled discharge plasma interaction with walls

Atis Skudra; Gita Revalde; Zanda Gavare; Juris Silinsh; Natalia Zorina; Boriss Polyakov

doi:10.1002/ppap.200732322

Study of the high-frequency inductive coupled discharge plasma interaction with walls

Atis Skudra^*
, Gita Revalde
, Zanda Gavare
, Juris Silinsh
, Natalia Zorina
, Boriss Polyakov

^*Corresponding author for this work

University of Latvia

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

The high-frequency electrodeless light sources (HFELS) are widely used as bright radiators of narrow and intense spectral lines covering the region from VUV to IR. Special HFELS filled with pure helium at pressures from 0.2 to 5 Torr were prepared for diagnostics of interaction between the filling element and the wall material (glass). Pollution of the discharge plasma with the oxygen admixture was studied by spectroscopy. Atomic force microscopy experiments were performed to find modification of the wall surface at the nanoscale level. Release of oxygen by the walls is found to depend strongly on the discharge conditions and significant changes of the surface structure are detected after plasma treatment.

Original language	English
Pages (from-to)	S1026-S1029
Journal	Plasma Processes and Polymers
Volume	4
Issue number	SUPPL.1
DOIs	https://doi.org/10.1002/ppap.200732322
Publication status	Published - 2007

Keywords

Atomic force microscopy (AFM)
Low-pressure discharges
Modification
Optical emission spectroscopy (OES)
Plasma treatment
Surface modification

Access to Document

10.1002/ppap.200732322

Cite this

@article{885eb0db51ca4580a4cd309213fcf467,

title = "Study of the high-frequency inductive coupled discharge plasma interaction with walls",

abstract = "The high-frequency electrodeless light sources (HFELS) are widely used as bright radiators of narrow and intense spectral lines covering the region from VUV to IR. Special HFELS filled with pure helium at pressures from 0.2 to 5 Torr were prepared for diagnostics of interaction between the filling element and the wall material (glass). Pollution of the discharge plasma with the oxygen admixture was studied by spectroscopy. Atomic force microscopy experiments were performed to find modification of the wall surface at the nanoscale level. Release of oxygen by the walls is found to depend strongly on the discharge conditions and significant changes of the surface structure are detected after plasma treatment.",

keywords = "Atomic force microscopy (AFM), Low-pressure discharges, Modification, Optical emission spectroscopy (OES), Plasma treatment, Surface modification",

author = "Atis Skudra and Gita Revalde and Zanda Gavare and Juris Silinsh and Natalia Zorina and Boriss Polyakov",

year = "2007",

doi = "10.1002/ppap.200732322",

language = "English",

volume = "4",

pages = "S1026--S1029",

journal = "Plasma Processes and Polymers",

issn = "1612-8850",

publisher = "Wiley-VCH Verlag",

number = "SUPPL.1",

}

TY - JOUR

T1 - Study of the high-frequency inductive coupled discharge plasma interaction with walls

AU - Skudra, Atis

AU - Revalde, Gita

AU - Gavare, Zanda

AU - Silinsh, Juris

AU - Zorina, Natalia

AU - Polyakov, Boriss

PY - 2007

Y1 - 2007

N2 - The high-frequency electrodeless light sources (HFELS) are widely used as bright radiators of narrow and intense spectral lines covering the region from VUV to IR. Special HFELS filled with pure helium at pressures from 0.2 to 5 Torr were prepared for diagnostics of interaction between the filling element and the wall material (glass). Pollution of the discharge plasma with the oxygen admixture was studied by spectroscopy. Atomic force microscopy experiments were performed to find modification of the wall surface at the nanoscale level. Release of oxygen by the walls is found to depend strongly on the discharge conditions and significant changes of the surface structure are detected after plasma treatment.

AB - The high-frequency electrodeless light sources (HFELS) are widely used as bright radiators of narrow and intense spectral lines covering the region from VUV to IR. Special HFELS filled with pure helium at pressures from 0.2 to 5 Torr were prepared for diagnostics of interaction between the filling element and the wall material (glass). Pollution of the discharge plasma with the oxygen admixture was studied by spectroscopy. Atomic force microscopy experiments were performed to find modification of the wall surface at the nanoscale level. Release of oxygen by the walls is found to depend strongly on the discharge conditions and significant changes of the surface structure are detected after plasma treatment.

KW - Atomic force microscopy (AFM)

KW - Low-pressure discharges

KW - Modification

KW - Optical emission spectroscopy (OES)

KW - Plasma treatment

KW - Surface modification

UR - https://www.scopus.com/pages/publications/70349419694

U2 - 10.1002/ppap.200732322

DO - 10.1002/ppap.200732322

M3 - Article

AN - SCOPUS:70349419694

SN - 1612-8850

VL - 4

SP - S1026-S1029

JO - Plasma Processes and Polymers

JF - Plasma Processes and Polymers

IS - SUPPL.1

ER -

Study of the high-frequency inductive coupled discharge plasma interaction with walls

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this