Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

E. B. Araújo; E. C. Lima; I. K. Bdikin; A. L. Kholkin

doi:10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

E. B. Araújo^*
, E. C. Lima
, I. K. Bdikin
, A. L. Kholkin

^*Corresponding author for this work

Universidade Estadual Paulista Júlio de Mesquita Filho
University of Aveiro

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › Research › peer-review

Abstract

Lead zirconate titanate Pb(Zr _0.50Ti _0.50)O ₃ (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

Original language	English
Title of host publication	Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012
DOIs	https://doi.org/10.1109/ISAF.2012.6297844
Publication status	Published - 2012
Externally published	Yes
Event	2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM - Aveiro, Portugal Duration: 9 Jul 2012 → 13 Jul 2012

Publication series

Name	Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Conference

Conference	2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM
Country/Territory	Portugal
City	Aveiro
Period	9/07/12 → 13/07/12

Keywords

piezoresponse
PZT thin films
self-polarization

Access to Document

10.1109/ISAF.2012.6297844

Cite this

Araújo, E. B., Lima, E. C., Bdikin, I. K., & Kholkin, A. L. (2012). Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. In Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012 Article 6297844 (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012). https://doi.org/10.1109/ISAF.2012.6297844

Araújo, E. B. ; Lima, E. C. ; Bdikin, I. K. et al. / Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012).

@inproceedings{3cc5d5f703c34148a6ef3a5ae5bb7374,

title = "Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films",

abstract = "Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.",

keywords = "piezoresponse, PZT thin films, self-polarization",

author = "Ara{\'u}jo, \{E. B.\} and Lima, \{E. C.\} and Bdikin, \{I. K.\} and Kholkin, \{A. L.\}",

year = "2012",

doi = "10.1109/ISAF.2012.6297844",

language = "English",

isbn = "9781467326681",

series = "Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012",

booktitle = "Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012",

note = "2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM ; Conference date: 09-07-2012 Through 13-07-2012",

}

Araújo, EB, Lima, EC, Bdikin, IK & Kholkin, AL 2012, Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. in Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012., 6297844, Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012, 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM, Aveiro, Portugal, 9/07/12. https://doi.org/10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. / Araújo, E. B.; Lima, E. C.; Bdikin, I. K. et al.
Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. 6297844 (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012).

Research output: Chapter in Book/Report/Conference proceeding › Conference paper › Research › peer-review

TY - GEN

T1 - Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

AU - Araújo, E. B.

AU - Lima, E. C.

AU - Bdikin, I. K.

AU - Kholkin, A. L.

PY - 2012

Y1 - 2012

N2 - Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

AB - Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

KW - piezoresponse

KW - PZT thin films

KW - self-polarization

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U2 - 10.1109/ISAF.2012.6297844

DO - 10.1109/ISAF.2012.6297844

M3 - Conference paper

AN - SCOPUS:84867907929

SN - 9781467326681

T3 - Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

BT - Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012

T2 - 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM

Y2 - 9 July 2012 through 13 July 2012

ER -

Araújo EB, Lima EC, Bdikin IK, Kholkin AL. Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. In Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. 6297844. (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012). doi: 10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

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