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X-ray absorption spectroscopy of Cu-doped WO3 films for use in electrochemical metallization cell memory

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12 Citations (Scopus)

Abstract

We have performed the first synchrotron radiation X-ray absorption spectroscopy (EXAFS/XANES) study of the local atomic and electronic structure around Cu and W ions in WO3/Cu/WO3/Si and WO 3/Cu/Si multilayered structures, aimed for the application in the electrochemical metallization cell memory. The influence of low-temperature annealing at 135 °C has been investigated in details, and a structural model of Cu-doped WO3 films is proposed.

Original languageEnglish
Pages (from-to)87-91
Number of pages5
JournalJournal of Non-Crystalline Solids
Volume401
DOIs
Publication statusPublished - 1 Oct 2014

Keywords

  • Electrochemical metallization cell
  • EXAFS
  • Thin films
  • XANES

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