Spectroscopic characterization of perhydropolysilazane(PHPS) thin films.

In this data set, the obtained results of various physical-chemical methods: a) fourier transform infrared spectroscopy (FTIR), see files <br> phps_1prcnt_uv_air_FTIR.txt; <br> phps_5prcnt_10prcnt_ammonia_FTIR.txt; <br> phps_5prcnt_11prcnt_humidity_FTIR.txt; <br> phps_5prcnt_25prcnt_ammonia_FTIR.txt; <br> phps_5prcnt_93prcnthumidity_FTIR.txt; <br> phps_5prcnt_ammonia_gas_FTIR.txt; <br> phps_5prcnt_uv_air_FTIR.txt; <br> phps_5prcnt_uv_argon_FTIR.txt; phps_5prcnt_uv_oxygen_FTIR.txt; <br> <br> b) X-ray Photoelectron Spectroscopy (XPS), see files <br> phps_1prcnt_XPS_Si_O_N.txt; <br> phps_1prcnt_XPS_etching.txt; <br> phps_5prcnt_XPS_Si.txt; <br> phps_5prcnt_XPS_N.txt; <br> phps_5prcnt_XPS_O.txt; <b> <br> c) Raman spectroscopy, see files WTe2_Raman_70_days.txt; <br> <br> d) optical microscopy, see files WTe2 structure.jpg. will be summarized for the 1% and 5% perhydropolysilazane coatings and WTe2 structure.