A combined flame-field method for the deposition of hard C:H films

Diamond-like hard amorphous C:H films are deposited using a combined flame-field technique. The film deposition is carried out in a propane flame using field-induced dissociation of propane and transfer of hydrocarbon radicals to the negatively biased substrates. The electric field effect on the flame parameters and C:H film growth is studied. Investigations of the electric field effect on the flame parameters indicate a strong influence of the external field on a flame temperature and density of excited hydrocarbon radicals (CH₃, C₂H₂, CH, C₂) close to the exposed surface of a substrate. As a consequence, a field effect on a temperature of exposed sample and film growth is observed.