@article{41dde4dd86814aa88e2583be389233bd,
title = "Atomic layer deposition of aluminum oxide on modified steel substrates",
author = "Kaupo Kukli and Emma Salmi and Taivo J{\~o}giaas and Roberts Zabels and Mikael Schuisky and J{\"o}rgen Westlinder and Kenichiro Mizohata and Mikko Ritala and Markku Leskel{\"a}",
year = "2016",
doi = "10.1016/j.surfcoat.2016.06.064",
language = "English",
volume = "304",
pages = "1--8",
journal = "Surface and Coatings Technology",
issn = "0257-8972",
publisher = "Elsevier B.V.",
}