@inproceedings{87fc0843b0c84ce78a915a9e79276cd9,
title = "Design and structural characteristics of Ga2O3/por-GaAs/mono-GaAs Heterostructures for Advanced MEMS Applications",
abstract = "This study presents the synthesis and comprehensive characterization of a Ga2O3 por-GaAs/mono-GaAs heterostructure. Utilizing a combination of electrochemical etching and oxygen annealing, we have successfully fabricated a heterostructure that incorporates both crystalline and porous layers. XRD and Raman spectroscopy confirmed the presence of crystalline β-Ga2O3 and GaAs phases, while SEM analysis revealed a highly porous morphology indicative of a complex phase composition. The structural integrity and quality of the heterostructure offer promising implications for MEMS technologies, leveraging the unique properties of the composite materials for enhanced device performance.",
keywords = "electrochemical etching, Ga O, heterostructure, MEMS, mono-GaAs, oxygen annealing, por-GaAs, Raman spectroscopy, SEM, XRD",
author = "Suchikova Yana and Suchikova and Yana and Kovachov Sergii and Kovachov and Bohdanov Ihor and Sergii and Kosogov Ivan and Bohdanov and Drozhcha Dariya and Ihor and Kosogov and Ivan and Drozhcha and Dariya and Anatolijs Popovs",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.",
year = "2024",
doi = "10.1109/MEMSTECH63437.2024.10620009",
language = "English",
isbn = "979-835037862-7",
series = "International Conference on Perspective Technologies and Methods in MEMS Design",
pages = "48--51",
booktitle = "2024 IEEE 19th International Conference on the Perspective Technologies and Methods in MEMS Design, MEMSTECH 2024 - Proceedings",
}