@inbook{b4bacb1617aa4531a28bd492b5be2fc9,
title = "Electrical properties of single and multilayer silicon nitride dielectric for applications in nanocapacitors",
author = "Līga Avotiņa and Marina Romanova and Elīna Pajuste and Jurijs Dehtjars and Gunta Ķizāne and Zaslavskis Aleksandrs and Enichek Gennady",
year = "2019",
language = "English",
booktitle = "Advanced Materials and Technologies 2019 : 21st International Conference-School, August 19-23, 2019, Palanga : Book of Abstracts",
publisher = "Kaunas University of Technology",
address = "Lithuania",
}