Kopsavilkums
In this study, we investigate the impact of electrochemical etching on the nanostructuring of Indium Phosphide (InP). The work explores the effects of electrolyte composition on the morphological and compositional properties of InP surface layers, particularly considering etching in a water solution of nitric acid and the same solution but with an addition of hydrochloric acid. The results show that InP samples etched with HCl exhibit evenly etched square pores and lower oxygen content, indicating a more controlled and anisotropic etching process.
| Oriģinālvaloda | Angļu |
|---|---|
| Rīkotāja publikācijas nosaukums | 2023 IEEE 4th KhPI Week on Advanced Technology, KhPI Week 2023 - Conference Proceedings |
| ISBN (Elektroniski) | 9798350395532 |
| DOIs | |
| Publikācijas statuss | Publicēts - 2023 |
Publikāciju sērijas
| Nosaukums | 2023 IEEE 4th KhPI Week on Advanced Technology, KhPI Week 2023 - Conference Proceedings |
|---|
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