@inproceedings{36842be5ab3741478b80b78ef35788d2,
title = "Integrated Lossy Mode Resonance Sensor Based on SU-8 Waveguides",
abstract = "In recent years, lossy mode resonance (LMR) biosensors have proven to be promising devices for the analysis of biological entities. In this work, for the first time, the possibility of observing the LMR effect in photonic integrated sensor based on SU-8 waveguides for biosensing applications is presented. SU-8 is a polymer that is ideally suited for optical waveguide applications due to its very high optical transparency, chemical stability and simple fabrication process. The LMR effect is achieved by using ZnO and TiOx claddings over the waveguides. The influence of different cladding thicknesses and materials on the LMR effect is demonstrated. Different design waveguides are tested. Potential future applications and development steps of integrated LMR sensor will be discussed.",
keywords = "Lossy mode resonance, magnetron sputtering, photolithography, SU-8 waveguides",
author = "Edvīns Ļetko and Arturs Bundulis and Gatis Mozoļevskis and Viktors Vibornijs",
note = "Publisher Copyright: {\textcopyright} 2022 SPIE.",
year = "2022",
doi = "10.1117/12.2607716",
language = "English",
isbn = "9781510648678",
volume = "11998",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
editor = "Shensky, \{William M.\} and Ileana Rau and Okihiro Sugihara",
booktitle = "Organic Photonic Materials and Devices XXIV",
}