@inbook{42fb38751de34f788093325a95418b71,
title = "Investigation of As-Se-S thin film as electron beam lithography multilevel resists",
author = "Vja{\v c}eslavs Gerbreders and Jānis Teteris",
year = "2013",
language = "English",
isbn = "9789984497938",
booktitle = "Developments in Optics and Communications 2013 : International Young Scientist Conference : Institute of Solid State Physics, University of Latvia : Riga, Latvia, April 10-12, 2013 : Book of abstracts.",
publisher = "Institute of Atomic Physics and Spectroscopy",
}