Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy

V. V. Shvartsman; A. V. Pankrashkin; V. P. Afanasjev; E. Yu Kaptelov; I. P. Pronin; A. L. Kholkin

doi:10.1080/10584580590897344

Piezoelectric properties of self-polarized Pb(Zr_xTi _1-x)O₃ thin films probed by scanning force microscopy

V. V. Shvartsman^*
, A. V. Pankrashkin
, V. P. Afanasjev
, E. Yu Kaptelov
, I. P. Pronin
, A. L. Kholkin

^*Šī darba korespondējošais autors

University of Aveiro
St. Petersburg State Electrotechnical University
Ioffe Physico-Technical Institute

Zinātniskās darbības rezultāts: Devums žurnālam › Konferences zinātniskais raksts › koleģiāli recenzēts

13 Atsauces (Scopus)

Kopsavilkums

Self'-polarization effect was observed in Pb(Zr_0.54Ti _0.46)O₃ (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO₂/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

Oriģinālvaloda	Angļu
Lapas (no-līdz)	103-111
Lapu skaits	9
Žurnāls	Integrated Ferroelectrics
Sējums	69
DOIs	https://doi.org/10.1080/10584580590897344
Publikācijas statuss	Publicēts - 2005
Ārēji publicēts	Jā
Pasākums	16th International Symposium on Integrated Ferroelectrics, ISIF-16 - Gyeongju, Dienvidkoreja Ilgums: 5 apr. 2004 → 8 apr. 2004

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10.1080/10584580590897344

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title = "Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy",

abstract = "Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol\% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.",

author = "Shvartsman, \{V. V.\} and Pankrashkin, \{A. V.\} and Afanasjev, \{V. P.\} and Kaptelov, \{E. Yu\} and Pronin, \{I. P.\} and Kholkin, \{A. L.\}",

year = "2005",

doi = "10.1080/10584580590897344",

language = "English",

volume = "69",

pages = "103--111",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Ltd.",

note = "16th International Symposium on Integrated Ferroelectrics, ISIF-16 ; Conference date: 05-04-2004 Through 08-04-2004",

}

TY - JOUR

T1 - Piezoelectric properties of self-polarized Pb(ZrxTi 1-x)O3 thin films probed by scanning force microscopy

AU - Shvartsman, V. V.

AU - Pankrashkin, A. V.

AU - Afanasjev, V. P.

AU - Kaptelov, E. Yu

AU - Pronin, I. P.

AU - Kholkin, A. L.

PY - 2005

Y1 - 2005

N2 - Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

AB - Self'-polarization effect was observed in Pb(Zr0.54Ti 0.46)O3 (PZT) films with 10 mol% of PbO excess RF magnetron sputtered onto Pt/Ti/SiO2/Si substrates. On the contrary, no self-polarization was found in films sputtered from stoichiometric targets. Local piezoelectric measurements revealed the asymmetry in the piezoelectric distributions of self-polarized films that was significantly reduced after UV illumination. The tentative model was suggested that may explain the observed results.

UR - https://www.scopus.com/pages/publications/33644795364

U2 - 10.1080/10584580590897344

DO - 10.1080/10584580590897344

M3 - Conference article

AN - SCOPUS:33644795364

SN - 1058-4587

VL - 69

SP - 103

EP - 111

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

T2 - 16th International Symposium on Integrated Ferroelectrics, ISIF-16

Y2 - 5 April 2004 through 8 April 2004

ER -