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Simple method for measuring bilayer system optical parameters

  • E. Nitiss*
  • , R. Usans
  • , M. Rutkis
  • *Šī darba korespondējošais autors

Pētījuma izpildes rezultāts: Nodaļa grāmatā/enciklopēdijā/konferences krājumāKonferences zinātniskais rakstsPētniecībakoleģiāli recenzēts

4 Atsauces (Scopus)

Kopsavilkums

A simple method for measuring bilayer system refractive indexes and thicknesses in the low absorbing part of spectra is demonstrated. The method is based on application of Savitzky - Golay smoothing filters and interference fringe separation in the reflected or transmitted spectra of the bilayer system. The refractive indexes and thicknesses are extracted from the wavelengths corresponding to extreme points in the spectrum. Due to the fact that wavelength difference of extreme points in the analyzed spectrum is defined by the product of both, the layer thickness and refractive index, one must generate an appropriate initial guess of these parameters. For refractive index approximation two different methods have been used - point by point and Sellmeier dispersion relation. The final optimization procedure is based on a priori assumption that the thickness calculated from permutations of all extreme points in the spectrum should be the same. Thus the optimal penalty parameter for finding the solution is the standard deviation of calculated thicknesses. In order to demonstrate the effectiveness of this simple method, results of thin organic film thicknesses and refractive indexes are presented.

OriģinālvalodaAngļu
Rīkotāja publikācijas nosaukumsOptical Micro- and Nanometrology IV
DOIs
Publikācijas statussPublicēts - 2012
PasākumsOptical Micro- and Nanometrology IV - Brussels, Beļģija
Ilgums: 16 apr. 201218 apr. 2012

Publikāciju sērijas

NosaukumsProceedings of SPIE - The International Society for Optical Engineering
Sējums8430
ISSN (Drukātā versija)0277-786X

Konference

KonferenceOptical Micro- and Nanometrology IV
Valsts/TeritorijaBeļģija
PilsētaBrussels
Periods16/04/1218/04/12

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