@inproceedings{f0adcc151a5d4bae88e9468667349a28,
title = "Synthesis and Characterization of Hierarchical ZnO/ZnS Nanostructures on Porous Silicon for Advanced MEMS Applications",
abstract = "This study uses a straightforward and cost-effective method to present the synthesis, morphological, and structural characterization of hierarchical ZnO/ZnS nanostructures formed on porous silicon substrates. We achieved flower-like crystallites by employing a two-stage synthesis process, showcasing a unique morphology with an increased surface area. Detailed analysis through Raman spectroscopy and X-ray diffraction (XRD) elucidated the heterostructure's high crystallinity and structural integrity despite inherent lattice mismatches. The study reveals that the flower-like hierarchical morphology, combined with the material's compositional properties, significantly enhances its physicochemical properties. These findings suggest potential ZnO/ZnS heterostructure applications in various microelectromechanical system (MEMS) technologies, including sensors, photodetectors, and photocatalysts.",
keywords = "Heterostructure, MEMS technology, nanostructure synthesis, nanostructures, porous silicon, Raman spectroscopy, X-ray diffraction",
author = "Yana Suchikova and Sergii Kovachov and Ihor Bohdanov and Ivan Kosogov and Dariya Drozhcha and Anatolijs Popovs",
note = "Publisher Copyright: {\textcopyright} 2024 IEEE.",
year = "2024",
doi = "10.1109/MEMSTECH63437.2024.10620059",
language = "English",
isbn = "979-835037862-7",
series = "International Conference on Perspective Technologies and Methods in MEMS Design",
pages = "124--127",
booktitle = "2024 IEEE 19th International Conference on the Perspective Technologies and Methods in MEMS Design, MEMSTECH 2024 - Proceedings",
}