Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

E. B. Araújo; E. C. Lima; I. K. Bdikin; A. L. Kholkin

doi:10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

E. B. Araújo^*
, E. C. Lima
, I. K. Bdikin
, A. L. Kholkin

^*Šī darba korespondējošais autors

Universidade Estadual Paulista Júlio de Mesquita Filho
University of Aveiro

Zinātniskās darbības rezultāts: Nodaļa grāmatā/enciklopēdijā/konferences krājumā › Konferences zinātniskais raksts › Pētniecība › koleģiāli recenzēts

Kopsavilkums

Lead zirconate titanate Pb(Zr _0.50Ti _0.50)O ₃ (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

Oriģinālvaloda	Angļu
Rīkotāja publikācijas nosaukums	Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012
DOIs	https://doi.org/10.1109/ISAF.2012.6297844
Publikācijas statuss	Publicēts - 2012
Ārēji publicēts	Jā
Pasākums	2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM - Aveiro, Portugāle Ilgums: 9 jūl. 2012 → 13 jūl. 2012

Publikāciju sērijas

Nosaukums	Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

Konference

Konference	2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM
Valsts/Teritorija	Portugāle
Pilsēta	Aveiro
Periods	9/07/12 → 13/07/12

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10.1109/ISAF.2012.6297844

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Araújo, E. B., Lima, E. C., Bdikin, I. K., & Kholkin, A. L. (2012). Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. (gadā) Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012 Zinātniskais raksts 6297844 (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012). https://doi.org/10.1109/ISAF.2012.6297844

Araújo, E. B. ; Lima, E. C. ; Bdikin, I. K. u.c. / Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012).

@inproceedings{3cc5d5f703c34148a6ef3a5ae5bb7374,

title = "Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films",

abstract = "Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.",

keywords = "piezoresponse, PZT thin films, self-polarization",

author = "Ara{\'u}jo, \{E. B.\} and Lima, \{E. C.\} and Bdikin, \{I. K.\} and Kholkin, \{A. L.\}",

year = "2012",

doi = "10.1109/ISAF.2012.6297844",

language = "English",

isbn = "9781467326681",

series = "Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012",

booktitle = "Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012",

note = "2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM ; Conference date: 09-07-2012 Through 13-07-2012",

}

Araújo, EB, Lima, EC, Bdikin, IK & Kholkin, AL 2012, Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. (kur) Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012., 6297844, Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012, 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM, Aveiro, Portugāle, 9/07/12. https://doi.org/10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. / Araújo, E. B.; Lima, E. C.; Bdikin, I. K. u.c.
Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. 6297844 (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012).

Zinātniskās darbības rezultāts: Nodaļa grāmatā/enciklopēdijā/konferences krājumā › Konferences zinātniskais raksts › Pētniecība › koleģiāli recenzēts

TY - GEN

T1 - Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

AU - Araújo, E. B.

AU - Lima, E. C.

AU - Bdikin, I. K.

AU - Kholkin, A. L.

PY - 2012

Y1 - 2012

N2 - Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

AB - Lead zirconate titanate Pb(Zr 0.50Ti 0.50)O 3 (PZT) thin films were deposited by a polymeric chemical method on Pt(111)/Ti/SiO2/Si substrates to understand the mechanisms of phase transformations and the effect of film thickness on the structure, dielectric and piezoelectric properties in these films. PZT films pyrolyzed at temperatures higher than 350 °C present a coexistence of pyrochlore and perovskite phases, while only perovskite phase grows in films pyrolyzed at temperatures lower than 300 °C. For pyrochlore-free PZT thin films, a small (100) orientation tendency near the film-substrate interface was observed. Finally, we demonstrate the existence of a self-polarization effect in the studied PZT thin films. Results suggest that Schottky barriers and/or mechanical coupling near the filmsubstrate interface are not primarily responsible for the observed self-polarization effect in our films.

KW - piezoresponse

KW - PZT thin films

KW - self-polarization

UR - https://www.scopus.com/pages/publications/84867907929

U2 - 10.1109/ISAF.2012.6297844

DO - 10.1109/ISAF.2012.6297844

M3 - Conference paper

AN - SCOPUS:84867907929

SN - 9781467326681

T3 - Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012

BT - Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012

T2 - 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics Held with 11th IEEE European Conf. on Applications of Polar Dielectrics and 4th IEEE Int. Symp on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/ECAPD/PFM

Y2 - 9 July 2012 through 13 July 2012

ER -

Araújo EB, Lima EC, Bdikin IK, Kholkin AL. Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films. (gadā) Proc. of 2012 21st IEEE International Symposium on Applications of Ferroelectrics Held Jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE, ISAF/ECAPD/PFM 2012. 2012. 6297844. (Proceedings of 2012 21st IEEE Int. Symp. on Applications of Ferroelectrics held jointly with 11th IEEE European Conference on the Applications of Polar Dielectrics and IEEE PFM, ISAF/ECAPD/PFM 2012). doi: 10.1109/ISAF.2012.6297844

Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline PZT thin films

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