UV optical record and electron beam lithography in polymer films

Zinātniskās darbības rezultāts: Devums žurnālam › Konferences zinātniskais raksts › koleģiāli recenzēts

1 Atsauce (Scopus)

Oriģinālvaloda	Angļu
Raksta numurs	012027
Žurnāls	IOP Conference Series : Materials Science and Engineering
Sējums	38
Izdevuma numurs	1
DOIs	https://doi.org/10.1088/1757-899X/38/1/012027
Publikācijas statuss	Publicēts - 2012

OECD Zinātnes nozare

@article{a976aef3c8944409a0119d54d145e521,

title = "UV optical record and electron beam lithography in polymer films",

author = "Andrejs Gerbreders and Jānis Teteris and O. {\v S}imane and Vadims Kolobjonoks",

year = "2012",

doi = "10.1088/1757-899X/38/1/012027",

language = "English",

volume = "38",

journal = "IOP Conference Series : Materials Science and Engineering",

number = "1",

}

TY - JOUR

T1 - UV optical record and electron beam lithography in polymer films

AU - Gerbreders, Andrejs

AU - Teteris, Jānis

AU - Šimane, O.

AU - Kolobjonoks, Vadims

PY - 2012

Y1 - 2012

UR - https://iopscience.iop.org/article/10.1088/1757-899X/38/1/012027

UR - https://www.scopus.com/pages/publications/84874028905

U2 - 10.1088/1757-899X/38/1/012027

DO - 10.1088/1757-899X/38/1/012027

M3 - Conference article

VL - 38

JO - IOP Conference Series : Materials Science and Engineering

JF - IOP Conference Series : Materials Science and Engineering

IS - 1

M1 - 012027

ER -